Spin Coater
Model: SPIN150i
Brand: SpinCoating
Origin: Germany
Technical Specifications
Unlimited Program Storage for recipes with multiple
steps / each for: Time 0.1-99999 sec/step
Speed 0-12,000 rpm
Rotation direction (CW, CCW, puddling)
Acceleration /Deceleration 1-30,000 rpm/sec.
selectable per step
Vacuum On /Off
3 Programmable Dry Contacts: e.g. for automated
control of Dispense unit, Nitrogen diffuser, etc.
Structured and password protected recipe storage
for easy and safe management
Digitally controlled Motor with digital incremental
speed signal feed back
Supplied Includes: (1) standard Vacuum Chuck
A-V36-S45-PP, Ø45 mm for up to Ø 6“ wafers
(1) D-V10-S50-PP, Small Fragment Adapter for
Ø ½“- Ø 2’’ Pieces and Fragments
(Alternative Chucks optionally available)
Drain connection 1” male NPT
Features
Spin processor for cleaning, drying, coating,
developing and/or etching of up to Ø 160 mm
substrates
Full-Plastic System in Natural Polypropylene (NPP)
Table-Top Model for manual or automated (optional)
chemical dispense
Transparent Lid with syringe holder for central
dispensing
Electro-magnetic safety lid lock
Detachable controller interface for easy integration
N2 diffuser for N2 purge during process.
Easy, step- by- step recipe programming via
large colour touchscreen.
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